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Mechanical vacuum feedthrough using gas lubricated guiding elements

: Heidler, Nils; Gossel, Marcus; Risse, Stefan; Eberhardt, Ramona; Schenk, Christoph

Rekawa, Senajith ; American Society for Precision Engineering -ASPE-:
27th Annual Meeting of the American Society for Precision Engineering 2012. Proceedings : October 21 - 26, 2012, San Diego, Calif.
Raleigh, NC: ASPE, 2012
ISBN: 978-1-887706-61-2
American Society for Precision Engineering (ASPE Annual Meeting) <27, 2012, San Diego/Calif.>
Conference Paper
Fraunhofer IOF ()

Aerostatic gas-bearing elements are widely used to achieve high motion accuracy. With appropriate sealing and exhaustion systems, these elements can be used to transfer high-precise movements into a vacuum environment.
Within this paper, a gas bushing with porous flow restrictor is used for the transmission of a mechanical movement into a vacuum chamber. Design and theoretical layout of the necessary sealing and evacuation system are shown. Experimental results prove the feasibility to transmit mechanical movement from normal atmosphere to high vacuum environment (10hoch-2 Pa) with two-stage exhaust system.