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Different ion implanted edge terminations for Schottky diodes on SiC
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2003
Conference Paper
Titel
Different ion implanted edge terminations for Schottky diodes on SiC
Author(s)
Weiss, R.
Frey, L.
Ryssel, H.
Hauptwerk
Ion implantation technology, IIT 2002
Konferenz
International Conference on Ion Implantation Technology (IIT) 2002
DOI
10.1109/IIT.2002.1257958
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB