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Evaluation of aluminum contamination on large-diameter wafers in ULSI fabrication
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2003
Conference Paper
Titel
Evaluation of aluminum contamination on large-diameter wafers in ULSI fabrication
Author(s)
Nutsch, A.
Shimizu, H.
Englmüller, A.
Fabry, L.
Hauptwerk
IEEE International Symposium on Semiconductor Manufacturing 2003. Conference proceedings
Konferenz
International Symposium on Semiconductor Manufacturing (ISSM) 2003
DOI
10.1109/ISSM.2003.1243271
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB