Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors

 
: Lemberger, M.; Paskaleva, A.; Zürcher, S.; Bauer, A.J.; Frey, L.; Ryssel, H.

:

Ghibaudo, G.:
Dielectrics in microelectronics, WoDiM 2002 : 12th Workshop on Dielectrics in Microelectronics, held in Grenoble on November 2002
Oxford: Pergamon, 2003 (Microelectronics reliability 43.2003,Nr.8. Special section)
pp.1253-1257
Workshop on Dielectrics in Microelectronics (WoDiM) <12, 2002, Grenoble>
English
Conference Paper, Journal Article
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-21726.html