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Zirconium silicate films obtained from novel MOCVD precursors

 
: Lemberger, M.; Paskaleva, A.; Zürcher, S.; Bauer, A.J.; Frey, L.; Ryssel, H.

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Vedda, A.:
SiO 2 and advanced dielectrics : Proceedings of the 4th Franco-Italian Symposium on SiO2 and Advanced Dielectrics. Trento, Italy, September 16-18, 2002
Amsterdam: Elsevier, 2003 (Journal of non-crystalline solids 322.2003,1/3)
pp.147-153
Franco-Italian Symposium on SiO2 and Advanced Dielectrics <4, 2002, Trento>
English
Conference Paper, Journal Article
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-21725.html