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Influence of antenna shape and resist patterns on charging damage during ion implantation

 
: Dirnecker, T.; Bauer, A.J.; Beyer, A.; Frey, L.; Henke, D.; Ruf, A.; Ryssel, H.

:

Brown, B. ; Institute of Electrical and Electronics Engineers -IEEE-:
Ion implantation technology, IIT 2002 : 14th International Conference on Ion Implantation Technology. Proceedings. Taos, New Mexico, USA, 22 - 27 September 2002
Piscataway: IEEE Operations Center, 2003
ISBN: 0-7803-7155-0
ISBN: 0-7803-8238-2
pp.291-294
International Conference on Ion Implantation Technology (IIT) <14, 2002, Taos/NM>
English
Conference Paper
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-21712.html