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Reactive pulse magnetron sputtering for deposition of piezoelectric AlN layers

 
: Glöß, D.; Bartzsch, H.; Gittner, M.; Frach, P.; Herzog, T.; Walter, S.; Heuer, H.

Yurish, S.; Herzog, T.; Heuer, H.; Carvalho, V. ; International Academy, Research, and Industry Association -IARIA-:
SENSORDEVICES 2011, the Second International Conference on Sensor Device Technologies and Applications. WISH 2011, the First International Workshop on Intelligent Sensor Hub : August 21-27, 2011 - French Riviera, Nice/Saint Laurent du Var, France
Red Hook, NY: Curran, 2012
ISBN: 978-1-61208-145-8
pp.135-138
International Conference on Sensor Device Technologies and Applications (SENSORDEVICES) <2, 2011, Nice>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/N-216932.html