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Influence of platinum bottom electrodes on the piezoelectric performance of PZT thin films hot sputtered in a high volume production tool
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2012
Conference Paper
Titel
Influence of platinum bottom electrodes on the piezoelectric performance of PZT thin films hot sputtered in a high volume production tool
Author(s)
Kaden, D.
Quenzer, H.-J.
Kratzer, M.
Castaldi, L.
Wagner, B.
Heinz, B.
Mamazza, R.
Hauptwerk
Ferroelectric and Multiferroic Materials
Konferenz
Materials Research Society (Fall Meeting) 2011
Symposium P "Ferroelectric and Multiferroic Materials" 2011
DOI
10.1557/opl.2012.450
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT