Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Measurement and classification method regarding the emission of volatile organic compounds from cleanroom materials

Classification of volatile organic contamination from cleanroom materials: VDI 2083 part 17
: Keller, Markus; Gommel, Udo; Verl, Alexander

Fulltext urn:nbn:de:0011-n-2143723 (5.1 MByte PDF)
MD5 Fingerprint: 4c5756d04274ff0a8bfc8cfee9efcd8e
Created on: 27.9.2012

Zingre, Hans (Chairman); Gommel, Udo (Chairman) ; Swiss Contamination Control Society -SwissCCS-, Männedorf; International Confederation of Contamination Control Societies -ICCCS-; TH Zürich -ETH-, Institute of Quantum Electronics:
ICCCS 2012, International Symposium on Contamination Control. Clean Technologies - What is the Future?. Program and Proceedings. CD-ROM : Zurich, September 3-7, 2012
Zürich, 2012
8 pp.
International Symposium on Contamination Control (ICCCS) <21, 2012, Zürich>
Conference Paper, Electronic Publication
Fraunhofer IPA ()
Ausgasung; VOC Emission; Volatile Organic Compound (VOC); VDI 2083 Blatt 17; ISO-AMC-Classification; Airborne Molecular Contamination (AMC); Klassifizierung; Testen; Reinraum

In controlled environments and cleanroom technology, construction materials implemented in specific applications need to be assessed for emissions of volatile organic compounds (VOC) and classified in order to permit direct comparisons to be made. The paper presents a standardized procedure for testing and classifying materials with uniform sample preparation and defined storage times. It describes preparation of the samples, their storage in a VOC-reduced minienvironment, avoidance of cross-contamination, sampling using appropriate adsorbers in semi-automated micro-chambers and analysis via thermodesorption coupled with chromatography and mass spectrometry (TD-GC/MS). Once the active surface area, sampling time and VOC mass emitted are known, a specific emission rate can be determined which is then converted into a classification number. Knowledge of the emission class enables the VOC charge of a defined area at a specific point in time to be calculated in reality. The standardized procedure is laid down in the new guideline VDI 2083 part 17. The test and classification allow a fast material screening compared to existing large chamber measurements and other cleanroom relevant methods. The resulting material classification numbers are entered into the database and of the Fraunhofer industrial alliance CSM - cleanroom suitable materials to allow the tested products to be directly compared with one another. This enables a material selection already in the planning phase of a cleanroom or other environment. An easy-to-use simulation model enables the user to estimate the expected VOC-level and therefore the ISO-AMC-Classsification according to ISO 14644-8 of the environment to be constructed.