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Variable coupling of microcavities with poly-silicon heater
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2011
Conference Paper
Titel
Variable coupling of microcavities with poly-silicon heater
Author(s)
Frers, T.
Assion, F.
Berth, G.
Zrenner, A.
Hilleringmann, Ulrich
Hauptwerk
Smart systems integration 2011. 5th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components. CD-ROM
Konferenz
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2011
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS