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The EMRP project "thermal design and dimensional drift"
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2012
Conference Paper
Title
The EMRP project "thermal design and dimensional drift"
Author(s)
Flügge, J.
Beckert, Erik
Jennett, N.
Maxwell, T.
Petit, D.
Rudtsch, S.
Salgado, J.
Schalles, M.
Schödel, R.
Voigt, D.
Voigt, M.
Mainwork
12th International Conference of the European Society for Precision Engineering and Nanotechnology 2012. Proceedings. Vol.1
Conference
European Society for Precision Engineering and Nanotechnology (EUSPEN International Conference) 2012
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF
