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A Low Damage Patterning Scheme for Ultra Low-k Dielectrics
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2012
Journal Article
Titel
A Low Damage Patterning Scheme for Ultra Low-k Dielectrics
Author(s)
Zimmermann, Sven
Ahner, N.
Fischer, Tobias
Oszinda,T.
Uhlig, B.
Schulz, Stefan E.
Geßner, Thomas
Zeitschrift
Future fab international
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS