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Simple and efficient method to fabricate nano-cone arrays by FIB milling demonstrated on planar substrates and on protruded structures

Poster at MNE 2011, 37th International Conference on Micro&Nano Engineering 2011, 19.09.-23.09.2011, Berlin, Germany
: Rommel, M.; Bauer, A.J.; Frey, L.

Poster urn:nbn:de:0011-n-2124695 (1.0 MByte PDF)
MD5 Fingerprint: 98778ce78907d5d36dcd1699391a00ac
Created on: 4.9.2012

2011, 1 Folie
International Conference on Micro- and Nano-Engineering (MNE) <37, 2011, Berlin>
Poster, Electronic Publication
Fraunhofer IISB ()
focused ion beam (FIB); FIB patterning; patterning strategy; nano cone array; tip array