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Influence of annealing parameters on surface roughness, mobility, and contact resistance of aluminum implanted 4H SiC

Poster at ECSCRM 2010, 8th European Conference on Silicon Carbide and Related Materials, 29.08.-02.09.2010, Oslo, Norway
 
: Schmitt, H.; Häublein, V.; Bauer, A.J.; Frey, L.

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Poster urn:nbn:de:0011-n-2124685 (228 KByte PDF)
MD5 Fingerprint: 3498b2033b989ace6c406b7f915b4563
Created on: 4.9.2012


2010, 1 Folie
European Conference on Silicon Carbide and Related Materials (ECSCRM) <8, 2010, Oslo>
English
Poster, Electronic Publication
Fraunhofer IISB ()
SiC; aluminum; ion implantation; contact resistance; mobility; surface roughness

: http://publica.fraunhofer.de/documents/N-212468.html