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Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography

Poster at MNE 2011, 37th International Conference on Micro&Nano Engineering 2011, 19.09.-23.09.2011, Berlin, Germany
 
: Schmitt, H.; Duempelmann, P.; Fader, R.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.

:
Poster urn:nbn:de:0011-n-2124653 (1.1 MByte PDF)
MD5 Fingerprint: b3abe4ba1e85e8557b9d95fb56039760
Created on: 4.9.2012


2011, 1 Folie
International Conference on Micro- and Nano-Engineering (MNE) <37, 2011, Berlin>
English
Poster, Electronic Publication
Fraunhofer IISB ()
substrate conformal imprint lithography; SCIL; UV-SCIL; PDMS stamp; life time

: http://publica.fraunhofer.de/documents/N-212465.html