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Nb2O5 and TiO2 thin films deposited by pulse magnetron sputtering of cylindrical ceramic targets

 
: Preußner, T.; Blüthner, R.; Kopte, T.

Meinema, H.A. (Hrsg.) ; International Council for Coatings on Glass e.V. -ICCG-:
ICCG 2012, Proceedings 9th International Conference on Coatings on Glass and Plastics : June 24-28, 2012, Breda, The Netherlands
Breda, 2012
ISBN: 978-905986-404-7
pp.335-339
International Conference on Coatings on Glass and Plastics (ICCG) <9, 2012, Breda>
English
Conference Paper
Fraunhofer FEP ()
magnetron sputtering; ceramic targets

: http://publica.fraunhofer.de/documents/N-212387.html