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Low demage magnetron sputtering of TCO films

 
: Bartzsch, H.; Glöß, D.; Frach, P.; Gittner, M.; Gottfried, C.; Suzuki, K.

Meinema, H.A. (Hrsg.) ; International Council for Coatings on Glass e.V. -ICCG-:
ICCG 2012, Proceedings 9th International Conference on Coatings on Glass and Plastics : June 24-28, 2012, Breda, The Netherlands
Breda, 2012
ISBN: 978-905986-404-7
pp.207-208
International Conference on Coatings on Glass and Plastics (ICCG) <9, 2012, Breda>
English
Conference Paper
Fraunhofer FEP ()
ITO; TCO; magnetron sputtering; magnetic field

: http://publica.fraunhofer.de/documents/N-212386.html