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1994
Conference Paper
Titel
Properties of multicrystalline silicon heat treated by classical and rapid thermal processing
Abstract
Modulated Free Carrier IR-Absorption (MFCA) is introduced as a contactless measurement technique for characterizing minority charge carrier lifetimes in multicrystalline silicon with intermediate spatial resolution. The method is used to evaluate thermal annealing experiments on different cast and ribbon materials. It is found that by a pure thermal treatment without external gettering in one type of cast silicon a strong lifetime improvement can occur, while another type remains almost unchanged. The ribbon material deteriorates without additional gettering.
Author(s)