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2003
Conference Paper
Title
Advanced lifetime spectroscopy
Abstract
Lifetime spectroscopy (LS) always allows a complete defect characterization on one single sample if data from injection- and temperature-dependent LS (TDLS and IDLS) are combined. To allow an accurate modeling of entire TDLS curves, several physical extensions are introduced in the basic Shockley-Read-Hall (SRH) model. A new routine for data evaluation allows a transparent SRH analysis of IDLS and TDLS data and enables the accuracy and consistency of the determined defect parameters to be assessed. Applied to LS data from a molybdenum-contaminated silicon sample, the advanced LS enables the identification of a known molybdenum donor level at E(ind t)-E(ind V)=0.317 eV with an enhanced electron/hole capture cross section ratio k:= sigma(ind n)/ sigma(ind p)=13. The good agreement with literature and the consistency of the LS results manifest the potential of the proposed advanced LS analysis. If the value for sigma(ind p) is taken from literature, the unknown electron capture cross section of the molybdenum donor level is determined as sigma(ind n)=7.8×10(exp -15) cm-3.