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Laser Chemical Processing (LCP) - A versatile tool for microstructuring applications

Presentation held at the 9th International Conference on Laser Ablation
: Kray, D.; Fell, A.; Hopman, S.; Mayer, K.; Glunz, S.W.; Willeke, G.P.

Fulltext urn:nbn:de:0011-n-2096982 (472 KByte PDF)
MD5 Fingerprint: a4ed949fdf1c6b2c1d5bf7fd6214b489
Created on: 28.11.2012

2007, 4 pp.
International Conference on Laser Ablation (COLA) <9, 2007, Tenerife>
Presentation, Electronic Publication
Fraunhofer ISE ()

Abstract Laser Chemical Processing (LCP) is presented as a novel microstructuring method for multiple applications. Via the combination of a chemical liquid jet and a laser beam, thermochemical and photochemical reactions can be initiated. Due to the free choice of the chemistry for the carrier liquid and the laser source efficient processes can be devised for a large variety of applications. We present some examples for the microstructuring of silicon with the focus on etching, phosphorus doping and the combination of both.