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An approach to robust layout planning of AMHS

: Sturm, R.; Seidelmann, J.; Dorner, J.; Reddig, K.


Chick, S.E.:
Winter Simulation Conference 2003. Proceedings. Vol.2 : Fairmont Hotel, New Orleans, LA, U.S.A., December 7 - 10, 2003
New York: ACM Press, 2003
ISBN: 0-7803-8131-9
ISBN: 0-7803-8132-7
Winter Simulation Conference (WSC) <35, 2003, New Orleans/La.>
Conference Paper
Fraunhofer IPA ()
automated material handling system; AMHS; layout planning; Layoutplanung; Wafer Fab; design

The simulation-based layout planning of automated material handling systems (AMHS) for microelectronics and semiconductor manufacturing demands adequate simulation models. An approach for measuring and quantifying the AMHS layout performance of alternative planning variants is required. Fraunhofer IPA has developed simulation methods and a three level approach for calculation of AMHS performance metrics. This approach is very efficient when comparing alternative planning variants, although the difference in the configuration change is very small. The paper outllines the planning approach for two typical AMHS designs used for interbay transportation in 200mm wafer fabs. The models used are generic and can be adapted easily to different AMHS solutions.