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Cofiring behavior of multilayer inductors based on substituted Y- and M-type hexagonal ferrites

: Bierlich, Silvia; Töpfer, J.; Barth, Stefan; Pawlowski, B.; Müller, Jörg; Bartsch-Torres, H.

Müller, Jens ; International Microelectronics and Packaging Society -IMAPS-; American Ceramic Society -ACerS-, Westerville/Ohio:
IMAPS/ACerS 8th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2012. Proceedings : April 16-19, 2012, Erfurt, Germany
Erfurt, 2012
International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT) <8, 2012, Erfurt>
Conference Paper
Fraunhofer IKTS ()
hexagonal ferrites; sintering behavior; permeability; co-firing; multilayer inductors

Sinter-active soft ferrites with adequate permeability profiles are required for the fabrication of multilayer ferrite inductors (MLFI) For MLFI fabrication, a Low Temperature Ceramic Co-firing (LTCC) process is used. Substituted hexagonal ferrites of Y- and M-type represent an important family of soft ferrites which might operate at high-frequency conditions up to 2 GHz. However, for Ag-based multilayer inductor applications a sinter process at 900°C is required. Low-temperature sinter ability is provided by the use of sub-micron powders and/or sintering additives. Substituted Y-type hexagonal ferrites Ba2Co2-x-yZnxCuyFe12O22 were obtained after sintering at 1000°C. Substitution of Cu for Co improved the low-temperature sintering behavior. The addition of 5wt.% Bi2O3 guarantees almost co mplete densification at 900°C. The saturation magnetization and permeability are significantly affected by the Zn-concentration. A maximum permeability of µ = 10 and cut-off frequency fg~2GHz was observed for a ferrite with y = 0.4. Co/Ti-subsituted M-type BaFe12-2yCoyTiyO19 ferrites can also be used for multilayer inductors. The magneto-crystalline anisotropy changes from unaxial to planar upon Co/Ti-substitution, and ferrites with y≥1.1 exhibit soft magnetic behavior. Ferrite powders were prepared at 1000°C. The addition of a sintering aid shifts the temperature of maximum shrinkage down to below 900°C and dense samples were obtained after firing at 900°C. A permeability of µ = 16 and a resonance frequency of 1 GHz was observed. Substituted M-type ferrites are stable during co-f iring at 900°C and show no sign of decomposition, i.e. these materials are LTCC-compatible. Ferrite tapes were prepared by tape casting and multilayer structures were fabricated by screen printing, stacking, lamination and final co-firing. Firing was performed at LTCC conditions i.e. 900°. We report on the co-firing behavior, microstructure and permeability of monolithic laminates. It is shown, that hexagonal Co2/Zn2Y- and Co/Ti-M-type ferrites are excellent magnetic materials for multilayer inductors.