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Combination of a nano-coordinate measuring machine with a low coherent digital holographic microscopy sensor for large scale measurements

: Stürwald, S.; Schmitt, R.


Juodkazis, S.:
Smart nano-micro materials and devices : 5 - 7 December 2011, Hawthorn, Australia
Bellingham, WA: SPIE, 2011 (Proceedings of SPIE 8204)
ISBN: 9780819488459
Art. 82043U
Smart Nano-Micro Materials and Devices <2011, Hawthorn>
Conference Paper
Fraunhofer IPT ()

A variety of microscopy techniques allow measuring different local physical properties of a surface under test. One of the key properties of interest in production and development of micro- and nano components is a nanometer resolution even in a measurement range of a few centimeters. By integrating a low coherent digital holographic microscope (DHM) into a coordinate measuring machine with sub nanometer resolution and nanometer uncertainty, a DHM with an outstanding measuring range is realized which enables simultaneous investigation of form and roughness of specimens with sizes up to 25 mm×25 mm×5mm along the x, y and z-axes. Different modes of scanning strategies have been analyzed and error compensated for micro and nano structured optical components with a surface diameter up to 25mm. For calculation of the correlation and thus effective coherence length, which is used for analysis of the topography of the specimen, a comprehensive theoretical approach is demonstra ted and experimentally verified.