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Structural and optical characterization of size controlled silicon nanocrystals in SiO2/SiOxNy multilayers

: Lopez-Vidrier, J.; Hernandez, S.; Hartel, A.M.; Hiller, D.; Gutsch, S.; Löper, P.; Lopez-Conesa, L.; Estrade, S.; Peiro, F.; Zacharias, M.; Garrido, B.

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Energy Procedia 10 (2011), pp.43-48
ISSN: 1876-6102
Symposium R "Advanced Inorganic Materials and Concepts for Photovoltaics" <2011, Nice>
European Materials Research Society (Spring Meeting) <2011, Nice>
Journal Article, Conference Paper, Electronic Publication
Fraunhofer ISE ()
Solarzellen - Entwicklung und Charakterisierung; Silicium-Photovoltaik; Industrielle und neuartige Solarzellenstrukturen

We offer a complete structural and optical study of samples containing silicon nanocrystals (Si-NCs) embedded in SiO 2/SiON multilayers, varying the oxynitride layer thickness from 2.5 to 7 nm. Using energy-filtered transmission electron microscopy we have determined the size distribution of the precipitated Si-nanoaggregates. Raman scattering measurements were used to investigate the Si-NC size and crystalline quality. By combining both techniques, the nanoaggregate crystalline degree has been evaluated, with values around 50% for all the samples. Photoluminescence spectroscopy has shown a blueshift of the emission at smaller NC sizes, presenting the sample with Si-NCs of 3.9 nm the best emission properties.