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Approaches for the reduction of the influence of parasitic capacitances on local IV characteristics for conductive AFM

Presentations held at 17th Workshop on Dielectrics in Microelectronics, June 25-27, Dresden, Germany
 
: Rommel, Mathias; Jambreck, Joachim D.; Murakami, Katsuhisa; Lemberger, Martin; Richter, Christoph; Weinzierl, Philip; Bauer, Anton J.; Frey, Lothar

:
presentation urn:nbn:de:0011-n-2084642 (6.6 MByte PDF)
MD5 Fingerprint: f37b324c12932601aba176f1b022f227
Created on: 19.7.2012


2012, 29 Folien
Workshop on Dielectrics in Microelectronics (WoDiM) <17, 2012, Dresden>
English
Presentation, Electronic Publication
Fraunhofer IISB ()
tunneling AFM; TUNA; conductive AFM; cAFM; parasitic capacitance; displacement current; shielded AFM probes

: http://publica.fraunhofer.de/documents/N-208464.html