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Evaluation of AlN material properties through vibration analysis of thin membranes

: Lebedev, V.; Knöbber, F.; Heidrich, N.; Sah, R.E.; Pletschen, W.; Cimalla, V.; Ambacher, O.


Physica status solidi. C 9 (2012), No.2, pp.403-406
ISSN: 1610-1634
ISSN: 1610-1642
ISSN: 1862-6351
Journal Article
Fraunhofer IAF ()

In this work, the mechanical properties of thin piezoelectric AlN films along with the methods and instruments to obtain this information with sufficient accuracy via dynamic (vibration) and static analyses of thin membranes are reported. In addition, the impact of different damping mechanisms on the amplitude of forced oscillations have been considered in order to obtain the analytical expression relating the resonant amplitude of membrane to the ambient gas pressure.