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Closed-loop control for quasi-static MOEMS mirrors

: Tortschanoff, A.; Holzmann, D.; Lenzhofer, M.; Sandner, T.


Schenk, H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and miniaturized systems XI : 24 - 25 January 2012, San Francisco, California
Bellingham, WA: SPIE, 2012 (Proceedings of SPIE 8252)
ISBN: 978-0-8194-8895-4
Paper 82520T
MOEMS and Miniaturized Systems Conference <11, 2012, San Francisco/Calif.>
Photonics West Conference <2012, San Francisco/Calif.>
Conference Paper
Fraunhofer IPMS ()

In this paper we present closed-loop control for accurate positioning of micro optical mechanical system (MOEMS) based scanner mirrors. An analog and a microcontroller based implementation of the control loop have been implemented and are presented in this paper. In particular, the measured results are compared to the characteristics of the devices when driven in open loop mode. Settlings times and operating bandwidth can be improved by a factor of 10 compared to open loop operation. Digital implementations have advantages in terms of flexibility, but show limitations for fast signals due to time discretization.