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Structuring of carbon nanotubes for field emission based movement sensors

: Loschek, S.; Hermann, S.; Yu, H.; Schulz, S.E.; Gessner, T.


Institute of Electrical and Electronics Engineers -IEEE-:
9th International Multi-Conference on Systems, Signals and Devices, SSD 2012 : 20 - 23 March 2012; Enhält 4 Teil-Konferenzen: International Conference on Systems, Analysis & Automatic Control (SAC); International Conference on Power Electrical Systems (PES); International Conference on Communication & Signal Processing (CSP); Conference on Sensors, Circuits & Instrumentation Systems (SCI)
New York, NY: IEEE, 2012
ISBN: 978-1-4673-1589-0
ISBN: 978-1-4673-1590-6
Art. 6198083
International Multi-Conference on Systems, Signals and Devices (SSD) <9, 2012, Chemnitz>
Conference Paper
Fraunhofer ENAS ()

This paper addresses the exploitation of the field emitting properties of carbon nanotubes for movement sensor applications. To utilize this transducer principle a well defined gap between the field emitting carbon nanotubes and the counter electrode must be formed. Three different methods to dissect the dielectrophoretically deposited carbon nanotubes in a reproducible way are presented.