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Preparation of periodically arranged metallic nanostructures using nanoimprint lithography

: Jüchter, S.; Hauser, H.; Wellens, C.; Guttowski, A.; Peters, M.; Goldschmidt, J.C.; Schwarz, U.T.; Bläsi, B.


Wehrspohn, R. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Photonics for Solar Energy Systems IV : April 2012, Brussels, Belgium
Bellingham, WA: SPIE, 2012 (Proceedings of SPIE 8438)
ISBN: 978-0-8194-9130-5
Paper 84380S
Conference "Photonics for Solar Energy Systems" <4, 2012, Brussels>
Conference Paper
Fraunhofer ISE ()
Fraunhofer IAF ()
light trapping; photon management; metallic nanostructures; plasmonic; localized plasmon; interference lithography; nanoimprint lithography; solar cell

We present a process chain to generate periodically arranged metallic nanostructures supporting plasmons for the use in solar cells. As proof-of-concept, platinum and silver nanoparticles with a period of 1 m and a diameter of 600 nm were fabricated. For the platinum particles, an absorption enhancement for light with a wavelength of 3.6 m was observed in silicon. By decreasing structure sizes the active spectral region can be shifted to wavelength relevant for solar cell applications. Therefore, in a second step a silver grating with a smaller period and also smaller diameter of approximately 200 nm was realized.