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Dielectric backside passivation - improvements by dipole optimization

: Jakschik, S.; Erben, E.; Benner, F.; Kupke, S.; Dirnstorfer, I.; Rose, M.; Endler, I.; Mikolajick, T.


European Commission:
26th European Photovoltaic Solar Energy Conference and Exhibition, EU PVSEC. Proceedings : 5th to 9th September 2011 at the CCH - Congress Centre and International Fair Hamburg in Germany
München: WIP-Renewable Energies, 2011
ISBN: 3-936338-27-2
European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) <26, 2011, Hamburg>
Conference Paper
Fraunhofer IKTS ()
charge formation; charge centroid; oxide interface; negative charge; crystalline silicon solar cell

Based on an examination of interface effects on negative fixed charge formation in Al2O3 we have been able to attribute the charge centroid to the oxide interface between Al2O3 and SiO2. The formation of negative fixed charge seems strongly related to the presence of oriented Al-O-Si bonds, which induce a dipole, causing the negative charge. Improvement of back side passivation should therefore focus on SiO2 interface optimization.