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Tungsten wire grid polarizer for applications in the DUV spectral range

 
: Weber, Thomas; Käsebier, Thomas; Helgert, Michael; Kley, Ernst-Bernhard; Tünnermann, Andreas

:

Applied optics 51 (2012), No.16, pp.3224-3227
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
English
Journal Article
Fraunhofer IOF ()

Abstract
In this paper, we present a broadband wire grid polarizer with a spectral working range down to a wavelength of 193 nm. Tungsten is chosen as grating material because it provides a high extinction ratio and transmission compared with other common grating materials. The fabrication of the grating with 100 nm period was accomplished using a spatial frequency doubling approach based on ultrafast electron beam lithography and a sophisticated deposition technique. At a wavelength of 193 nm, a transmission of about 44% and an extinction ratio of 20 was measured.

: http://publica.fraunhofer.de/documents/N-203651.html