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Concepts for production of low cost microsystems using reel to reel processes

Möglichkeiten zur Produktion von Low-Cost Mikrosytemen in Rolle zu Rolle Technik
: Feil, M.; Bock, K.; Endres, H.-E.; Richter, M.

Reichl, H. ; Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin; MESAGO Messe Frankfurt GmbH, Stuttgart:
Micro System Technologies 2003 : International Conference & Exhibition on Micro Electro, Opto, Mechanical Systems and Components, München, October 7-8, 2003
Poing: Franzis, 2003
ISBN: 3-7723-7020-9
International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components <2003, München>
Conference Paper
Fraunhofer IZM ()
Mikrosystemtechnik; Rolle zu Rolle; Sensorik; Aktorik; Interdigitalkondensator; chemischer Sensor

Todays microsystems (MEMS) are mostly characterized by high reliable but cost intensive processes. The base material used for MEMS elements is very often silicon with its well known characteristics but also with its costly production steps. Therefore, many good ideas for interesting products cannot be realized because of high development and production costs and small number of units. For a broader application of MEMS elements, new materials and easier techniques are required. In following sections, we will show some new concepts, which offer the possibility for low cost production.