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ARRANGEMENT OF ELECTRODES WITH RESPECT TO MOVING MICROMECHANICAL ELEMENTS

Anordnung von mikromechanischen Elementen
 
: Wullinger, I.; Duerr, P.

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Frontpage ()

WO 2006DE00997 A: 20060603
WO 2007140731 A1: 20071213
English
Patent, Electronic Publication
Fraunhofer IPMS ()

Abstract
The invention relates to arrangements of micromechanical, preferably microoptical elements, which are each held by means of spring elements. In this case, they can be pivoted, or else deflected translationally, by the effect of electrostatic forces about a rotation axis. The object of the invention is to provide an arrangement with micromechanical elements which can be operated without drift over a long time period without any need for frequent recalibration. The arrangement according to the invention with micromechanical elements is in this case designed such that electrodes are likewise arranged underneath micromechanical elements, that is to say on the side which electromagnetic radiation cannot strike directly. In this case, in each case one electrode is arranged and designed such that it is associated with at least two micromechanical elements.

: http://publica.fraunhofer.de/documents/N-201900.html