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Title
Vorrichtung und Verfahren zur Steuerung oder Regelung eines oszillierend auslenkbaren mikromechanischen Elements
Date Issued
2007
Author(s)
Schenk, H.
Patent No
2006DE00674
Abstract
The invention relates to an apparatus and a method for controlling or regulating the deflection of micromechanically produced deflectable elements which are driven electrostatically and deflected in an oscillating manner. It is here an object of the invention to provide a means which can be used to utilize a considerably larger deflection range while keeping the necessary voltage potential difference for the electrostatic drive of a deflection small and avoiding the occurrence of the pull-in effect. According to the invention, a deflectable element (1) is present, which is held on a frame element (5) by at least one spring element (2) and can be deflected using an electrostatic drive. The deflection can be achieved by means of at least one counter electrode (3a, 3b) on the deflectable element which can be used as an electrode. Furthermore, at least one detector (8) suitable for contact-less detection of at least one deflection position is present.
Language
de
en
Patenprio
WO 2006DE00674 A1: 20060411