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Plasma surface technologies in Germany

: Fellenberg, R.; Bräuer, G.

Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Society of Vacuum Coaters. 46th Annual Technical Conference 2003. Proceedings : May 3-8, 2003, San Francisco Marriott, San Francisco, CA
Albuquerque: SVC, 2003
ISBN: 1-591-24635-0
Society of Vacuum Coaters (Annual Technical Conference) <46, 2003, San Francisco/Calif.>
Conference Paper
Fraunhofer IST ()
Fraunhofer FEP ()
plasma surface engineering; pulse magnetron sputtering; tribological coating; technology transfer

Plasma surface engineering has become a key technology in Germany during the past two decades. The history of surface coating dates back to 1817 when Fraunhofer deposited antireflective films on lenses.
Today, plasma-based processes are widespread in various industrial branches. They are used by 50 % of German companies being active in the field of machine construction.
A further growth is limited by high costs and a qualification deficiency. Nevertheless, a lot of companies, in particular small- and medium-sized enterprises (SMEs), plan to introduce new processes or modernize existing ones within the next two years.
New developments focus on tribological coatings like diamond-like caron (DLC) and cubic boron nitride (c-BN). Pulse magnetron sputtering has opened the door to new applications of optical coatings on large areas. Solar cell manufactures ask for low cost deposition of semiconducting thin films and transparent conductive oxides. Concerning the field of information technology, high performance mirrors for EUV lithography and ultra-thin carbon overcoats for magnetic disks are in the center of interest.
The information about surface technology is scattered, unstructured and often not easily accessible. To overcome this dilemma, a suitable network has been created, and electronic information systems like INO® were built up.