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Low noise, large area CMOS X-ray image sensor for C.T. application

: Kemna, A.; Brockherde, W.; Hosticka, B.J.; Özkan, E.; Morales-Serrano, F.; Steadman, R.; Vogtmeier, G.


Institute of Electrical and Electronics Engineers -IEEE-:
IEEE Sensors 2003. Conference proceedings : Second IEEE International Conference on Sensors
Piscataway, NJ: IEEE Operations Center, 2003
ISBN: 0-7803-8134-3
International Conference on Sensors <2, 2003, Toronto>
Conference Paper
Fraunhofer IMS ()
hohe Helligkeitsdynamik; geringes Rauschen; Röntgenstrahlung; image sensor; low noise; large-area detector; x-ray detector; CMOS-Sensor; Bildsensor; Lichtempfänger; Röntgentechnik; Computer-Tomographie

In this paper, we describe a novel CMOS X-ray active pixel sensor for indirect C.T. X-ray detection. Considerable noise reduction has been achieved by lowering the detector junction capacitance. For this purpose a new low capacitance, low dark current dot type photodiode based on minority diffusion has been developed. The dynamic range is expanded to 17 bit by the use of individual in-pixel automatic gain control. A photon noise limited detector exhibiting a 20 x 10 pixel array with a frame rate of 3000 frames/sec has been realized in a 1.2µm CMOS process.