: Guenther, K.-M.; Witte, H.; Krost, A.; Kontermann, S.; Schade, W.

Abstract
We propose a method to obtain accurate capacitance-voltage (C-V) curves in the presence of multiple space charges. This method uses impedance spectroscopy to evaluate individual space charges separately. The advantage is that the knowledge of the exact equivalent circuit is not essentially needed. The comparison with other methods to calculate the doping concentration NA shows that our method is unaffected by series resistances and agrees best with the correct value of NA. The evaluation of the impedance spectra leads to a more thorough understanding of the respective Mott-Schottky plots.