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Title
Mikroelektromechanisches Translationsschwingersystem
Date Issued
2010
Author(s)
Schwarzenberg, M.
Drabe, C.
Patent No
102010029072
Abstract
Ein mikroelektromechanisches Translationsschwingersystem weist einen mikroelektromechanischen Translationsschwinger und einen gekoppelten akustischen Resonator auf. Der akustische Resonator ist ausgelegt und angeordnet so dass eine Resonanzfrequenz des akustischen Resonators an eine Eigenfrequenz des mikroelektromechanischen Translationsschwingers angepasst ist.
The system (100) has a micro-electromechanical translation vibrator (110) comprising a primary side (111) in which a tubular acoustic resonator (120) is arranged such that resonance frequency of the acoustic resonator is adapted to a natural frequency of the micro-electromechanical translation vibrator. The acoustic resonator comprises apertures such that the apertures face a swinging member (112) of the micro-electromechanical translation vibrator. The micro-electromechanical translation vibrator is designed to be driven electrostatically, electromagnetically or piezoelectrically. An independent claim is also included for a method for manufacturing a micro-electromechanical translation vibrator system.
Language
de
Patenprio
DE 102010029072 A