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Verfahren zum Beschichten eines Substrats mit aluminiumdotiertem Zinkoxid

: Sittinger, V.; Szyszka, B.; Dewald, W.; Säuberlich, F.; Stanowski, B.

Frontpage ()

DE 102009060547 A
Patent, Electronic Publication
Fraunhofer IST ()

The invention relates to a method for coating a substrate with aluminum-doped zinc oxide, comprising the steps of generating a nucleation coating between 5 nm and 400 nm thick, comprising zinc oxide or doped, in particular aluminum-doped zinc oxide, on the surface of the substrate by atomizing a solid target; generating a quasi-epitaxially propagating top coating comprising aluminum-doped zinc oxide on the nucleation coating; and wet chemically etching the top coating.