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Title
Beschichtung von Profilkörpern und Vorrichtung hierfür
Date Issued
2008
Author(s)
Schmid, K.
Wiedemann, E.
Patent No
102008061877
Abstract
Die vorliegende Erfindung bezieht sich im Bereich der elektrochemischen Metallabscheidung auf die Bestimmung von Prozessbedingungen bei der Beschichtung eines Profilkoerpers auf die Bestimmung der Charakteristik eines Elektrolyten und/oder auf die Bestimmung der Prozessbedingungen fuer das Abscheiden einer Schicht mit bestimmten Eigenschaften.
The apparatus for the determination of process conditions during coating a profile body (5) on its surface, for the determination of the characteristics of an electrolyte and/or for the determination of the process conditions for the deposition of a layer with determined layer properties and/or for coating a profile body, comprises a profile body formed as electrode, a rotatable counter electrode, and a container (1) filled with an electrolyte, where the profile body and the counter electrode are arranged within the electrolytes in the container. The apparatus for the determination of process conditions during coating a profile body (5) on its surface, for the determination of the characteristics of an electrolyte and/or for the determination of the process conditions for the deposition of a layer with determined layer properties and/or for coating a profile body, comprises a profile body formed as electrode, a rotatable counter electrode, and a container (1) filled with an electrolyte, where the profile body and the counter electrode are arranged within the electrolytes in the container, so that the profile body is present in the interior of the counter electrode, which is formed from several bodies (3). The profile body and the electrolyte are rotatable relative to each other with a determinable defined rotating speed. The shape of the profile body is formed, so that local flow velocities are produced on the surface of the profile body by the relative rotation of the profile body and the electrolyte and local current densities are produced by applying a voltage between the profile body and the counter electrode. A flow-velocity gradient of the local flow velocities along the profile body surface and a current-density gradient of the local current densities along the profile body surface do not stand vertical to each other. The profile body and the counter electrode are connected to a current source, so that the profile body is switched as cathode and the counter electrode is switched as anode. The profile body is rotatable in the electrolyte and/or the electrolyte is displaceable in rotation against the profile body. The cross-section of the profile body has a shape vertical to its rotation axis over the total length of the profile body to be coated. The shape of the cross-section is formed, so that the current-density gradient and the flow velocity gradient are produced onto the surface of the profile body along the cross-section. The profile body has a non-rotational symmetrical cross-section vertical to its rotation axis and has edges parallel to its rotation axis with a radius of 50 mu m. The profile body is a component with different geometric elements such as bores, gaps, grooves, edges, curves and/or sections and/or with areas of strong curve, where the component is processable and/or applicable to non-trial purposes after the coating. The rotating speeds of the profile body and/or electrolyte are changeable. The bodies, from which the counter electrode is formed, have a circular, elliptical or prismatic cross-section vertical to the rotation axis of the profile body and have a length larger, equal or smaller than the length of the profile body. The profile body is positioned in the interior of the counter electrode, where the distance between the profile body and the counter electrode is constant or variable. Independent claims are included for: (1) a method for the determination of flow velocity distribution and/or the current density distribution on a surface of the profile body; (2) a method for characterizing a first local flow velocity dependent property and/or a second local current density dependent property of an electrolyte using a profile body; (3) a method for calculating deposition conditions; and (4) a method for producing a layer on a profile body from an electrolyte.
Language
de
Patenprio
DE 102008061877 A