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Infrared micro mirror spektrometer for gas analysis
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2004
Conference Paper
Title
Infrared micro mirror spektrometer for gas analysis
Author(s)
Otto, Thomas
Saupe, Ray
Kaufmann, C.
Geßner, Thomas
Mainwork
Actuator 2004
Conference
International Conference on New Actuators 2004
International Exhibition on Smart Actuators and Drive Systems 2004
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS