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Tunable infrared filter based on a Fabry-Perot-Interferometer
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2003
Conference Paper
Titel
Tunable infrared filter based on a Fabry-Perot-Interferometer
Author(s)
Kurth, Steffen
Hiller, Karla
Dötzel, W.
Geßner, Thomas
Neumann, N.
Heinze, M.
Hauptwerk
Micro System Technologies 2003
Konferenz
International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components 2003
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS