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Harmonic Analysis of Microbeams with PZT on-Chip Actuating and Sensing

 
: Zhou, J.; Baum, M.; Schmiedel, R.; Huang, Y.; Ruan, G.; Geßner, T.

Journal of conference abstracts 8 (2003), No.1, pp.376
ISSN: 1362-0886
European Meeting on Ferroelectricity (EMF) <10, 2003, Cambridge>
English
Conference Paper, Journal Article
Fraunhofer ENAS ()

: http://publica.fraunhofer.de/documents/N-199258.html