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Reduced order of fluid structural interactions in MEMS based on modal projection techniques

: Mehner, J.; Dötzel, W.; Schauwecker, B.; Ostergard, D.


IEEE Electron Devices Society:
Transducers '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Vol.2 : Boston, June 8 - 12, 2003. Digest of technical papers
Piscataway: IEEE Operations Center, 2003
ISBN: 0-7803-7731-1
International Conference on Solid State Sensors, Actuators and Microsystems <12, 2003, Boston/Mass.>
Conference Paper
Fraunhofer ENAS ()

Reduced order macromodeling (ROM) of electrostatic structural interaction has become state of the art for fast component and system simulations. The following paper presents a new approach to add dissipative effects into existing macromodels for damped harmonic and transient analyses. The models are automatically generated by a modal projection technique based on the harmonic transfer functions of the fluidic domain. The transfer functions are either obtained at the initial position (small signal case) or at various deflection states (large deflection case). This method has been successfully applied to squeeze and slide film problems and holds for nontrivial plate shapes and arbitrary motion.