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Micromachined force coupled sensor actuator system for frequency selective vibration monitoring
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2006
Conference Paper
Titel
Micromachined force coupled sensor actuator system for frequency selective vibration monitoring
Author(s)
Forke, Roman
Scheibner, D.
Mehner, J.
Geßner, Thomas
Doetzel, W.
Hauptwerk
Actuator 2006. 10th International Conference on New Actuators & 4th International Exhibition on Smart Actuators and Drive Systems
Konferenz
International Conference on New Actuators 2006
International Exhibition on Smart Actuators and Drive Systems 2006
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS