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Tunable micromachined Fabry-Pérot Filters for infrared spectroscopy: Current state and prospects
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2011
Conference Paper
Titel
Tunable micromachined Fabry-Pérot Filters for infrared spectroscopy: Current state and prospects
Author(s)
Ebermann, M.
Neumann, N.
Meinig, Marco
Kurth, Steffen
Hiller, Karla
Gittler, E.
Hauptwerk
Smart systems integration 2011. 5th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components. CD-ROM
Konferenz
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2011
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS