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2010
Conference Paper
Titel
Design of piezoelectric cantilever actuators for silicon based MEMS
Abstract
The application of piezoelectric cantilever actuators in the field of MEMS is rapidly increasing. Thus there is a need of high precision manufacturing, which leads to a remarkable demand of preliminary computation. With aligned simulation methods it is feasible to provide a fast and efficient design with the advantage of detailed knowledge of the provided micro-electro-mechanical system. Recent progress in the field of wafer bonding enhances the usability of piezoceramic wafers for MEMS. For the development of new applications a design with respect to technological aspects is necessary. In this work we present a strategy to gain efficient models of piezoelectric cantilever actuators, which are used as transducing elements in sensor and especially actuator applications. A useful linkage between Finite-Element (FE)- and Lumped-Element (LE)-modelling the -Combined Simulation- is presented.