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A fast liquid flow sensor with thermal isolation by oxide filled tranches

 
: Kersjes, Ralf A.; Mokwa, Wilfried

:

Sensors and Actuators. A 47 (1995), No.1-3, pp.373-379
ISSN: 0924-4247
English
Journal Article
Fraunhofer IMS ()
anemometer; flowing-through; silicium-gate technology; Anemometer; Durchfluß; Silicium-Gate-Technologie

: http://publica.fraunhofer.de/documents/N-198822.html