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A fast liquid flow sensor with thermal isolation by oxide filled tranches
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1995
Journal Article
Title
A fast liquid flow sensor with thermal isolation by oxide filled tranches
Author(s)
Kersjes, Ralf A.
Mokwa, Wilfried
Journal
Sensors and Actuators. A
DOI
10.1016/0924-4247(94)00924-7
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
Keyword(s)
anemometer
flowing-through
silicium-gate technology
Anemometer
Durchfluß
Silicium-Gate-Technologie
