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2009
Conference Paper
Titel
Design of passive alignment structures for the batch alignment of micro components
Abstract
The research of structural elements for the passive alignment of micro components has been an essential task within the framework of the Collaborate Research Centre "SFB 440". The approach which has been pursued with the research done within the "SFB 440" is to use ultra precise manufacturing processes, such as diamond machining, for the production of passive alignment structures to support the assembly of hybrid micro systems. It has been particularly assessed which alignment precision can be achieved when using theses manufacturing process to create passive alignment structures for single standardized micro components such as spheres, cylinders and cubes. Today, the mass production of bulk micro components has become quite common using state of the art production technologies. Therefore, the further development of the passive alignment structures has been focussed on designing array structures in which similar micro components can be picked up, sorted and handled in a batch. These passive alignment arrays enable a sophisticated and automated handling single micro components, and arrange the bulk micro components in a well defined pattern structure which is essential to realize an efficient automated micro assembly. In this paper the development of passive alignment structures is presented, which have evolved from customized solutions for single components to batch handling devices for the parallel assembly of micro components.