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Nanometer multilayer coatings for applications in the X-ray range

: Leson, A.; Braun, S.; Dietsch, R.; Holz, T.; Mai, H.

2nd International Conference The Coatings in Manufacturing Engineering 2001. Conference Proceedings
Hannover, 2001
International Conference The Coatings in Manufacturing Engineering <2, 2001, Hannover>
Conference Paper
Fraunhofer IWS ()

Periodic multilayers are increasingly used as reflecting and beam forming elements in the x-ray range. Due to the short wavelength of the x-rays the demands on the thin film deposition process are quite high requiring tolerances down to the picometer range. Pulsed Laser deposition as well as magnetron sputtering have turned out to be most favourible processes meeting the requirements of x-ray optical elements. Göbel Mirrors as an example of laterally graded multilayer optics show superior performance in laboratory-based x-ray reflectometry and diffractometry opening up new possibilities.